Planar and ridge waveguides in Yb3+-doped silicate glasses fabricated by proton implantation and precise diamond blade dicing

• Published in: Optics communications Vol. 453
• Main Authors: Zhang, Jie, Guo, Wen-Tao, Tang, Chen-Yang, Yan, Sen, Li, Wei-Nan, Liu, Chun-Xiao
• Format: Journal Article
• Language: English
• Published: Elsevier B.V 15.12.2019
• Subjects: Annealing; Ion implantation; Precise diamond blade dicing; Waveguide; Yb[formula omitted]-doped silicate glass; Annealing; Ion implantation; Precise diamond blade dicing; Waveguide; Yb3+-doped silicate glass
• ISSN: 0030-4018; 1873-0310
• DOI: 10.1016/j.optcom.2019.124344

We firstly report on the planar waveguide via the single-energy proton implantation in the Yb3+-doped silicate glass. The implanted energy and fluence are 400 keV and 8.0×1016 ions/cm2, respectively. The thermal treatment at 200 °C for 1h was used to optimize waveguiding characteristics. The guided-mode spectra in the planar waveguide before and after annealing were characterized by the m-line method at 632.8 and 1539 nm. The distributions of refractive index for the as-implanted and annealed planar waveguides were reconstructed by the reflectivity calculation method. The optical characterizations were conducted at 632.8 nm using the end-fire coupling method before and after the thermal treatment. Then, the ridge waveguide was formed by the precise diamond blade dicing on the annealed planar Yb3+-doped silicate glass waveguide. The microscope image and near-field intensity profile of the ridge waveguide were investigated by the metallographic microscope and the end-face coupling system, respectively.