VUV photoionization of Si(CH 3) 2Cl 2 using synchrotron radiation

The complicated dissociative photoionization of Si(CH 3) 2Cl 2 has been investigated with photoionization mass spectrometry (PIMS) and a synchrotron as source of vacuum ultraviolet (VUV) radiation. We determined appearance energies (AE) of the parent cation Si ( CH 3 ) 2 Cl 2 + and various ionic fra...

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Bibliographic Details
Published inChemical physics letters Vol. 394; no. 1; pp. 126 - 131
Main Authors Lu, K.T., Ma, C.I., Chen, J.M., Chiang, S.Y.
Format Journal Article
LanguageEnglish
Published Elsevier B.V 11.08.2004
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Summary:The complicated dissociative photoionization of Si(CH 3) 2Cl 2 has been investigated with photoionization mass spectrometry (PIMS) and a synchrotron as source of vacuum ultraviolet (VUV) radiation. We determined appearance energies (AE) of the parent cation Si ( CH 3 ) 2 Cl 2 + and various ionic fragments - Si ( CH 3 ) 2 Cl + , Si ( CH 3 ) Cl 2 + , Si ( CH 3 ) Cl + , etc. – originating from photofragmentation. The appearance energy of Si ( CH 3 ) 2 Cl 2 + is 10.41 eV, in agreement with measurements of the photoelectron spectrum. Relative photoexcitation spectra of individual fragment ion yields are obtained and the dissociative processes are discussed. A comparison of Si(CH 3) 2Cl 2 and Si(CH 3)Cl 3 provides insight and understanding of fragmentation processes on dissociative photoionization of gaseous chlorosilanes.
ISSN:0009-2614
1873-4448
DOI:10.1016/j.cplett.2004.06.077