Vertically Aligned Carbon Nanotube Array (VANTA) Biosensor for MEMS Lab-on-a-Chip

We describe the fabrication, functionalization and characterization of vertically aligned carbon nanotube arrays (VANTAs) for biological sensor applications. This structure is created using a standard MEMS process and chemical vapor deposition (CVD) multi-walled carbon nanotube (MWNT) post-processin...

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Bibliographic Details
Published inSensors & transducers Vol. 7; no. Special Issue; pp. 47 - 55
Main Authors Joseph, Luke, Hasling, Thomas, Garmire, David
Format Journal Article
LanguageEnglish
Published Toronto IFSA Publishing, S.L 01.10.2009
Subjects
Bio MEMS
Biosensor
Chemical vapor deposition
Gold
Lab-on-a-chip
Nanotubes
Vertically aligned carbon nanotube array (VANTA)
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Summary:We describe the fabrication, functionalization and characterization of vertically aligned carbon nanotube arrays (VANTAs) for biological sensor applications. This structure is created using a standard MEMS process and chemical vapor deposition (CVD) multi-walled carbon nanotube (MWNT) post-processing. The device is well suited for full integration into microfluidic lab-on-a-chip solutions. Included is a spectroscopic characterization of the galvanostatic impedance of the device, as well as scanning electron microscopy (SEM) images of the pre- and post- functionalized device. Interferometric 3D profiling and X-ray spectroscopy were also used to check process assumptions. The work presented validates that this approach is an ideal candidate for low-cost, high-throughput manufacturing of biochemical sensors. Unlike previously published work [1,2] using SWNT, the use of MWNT arrays allows functionalization over the entirety of the nanotubes. This approach maintains low baseline impedance and increases the surface area leveraging inherent benefits of the VANTA. Copyright © 2009 IFSA. [PUBLICATION ABSTRACT]
ISSN:2306-8515
1726-5479