Vibration control of cryopump with an active dynamic vibration absorber

A vibration isolation device with an active dynamic vibration absorber is developed to remove vibration induced by a cryopump. Cryopump is used to make high-vacuum and low-temperature environments for precise measurement. However, it induces vibrations with multiple frequencies, which may deteriorat...

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Bibliographic Details
Published inKikai Gakkai ronbunshū = Transactions of the Japan Society of Mechanical Engineers Vol. 85; no. 873; p. 18-00461
Main Authors MIZUNO, Takeshi, IIDA, Takahito, ISHINO, Yuji, TAKASAKI, Masaya, HARA, Masayuki, YAMAGUCHI, Daisuke, KANO, Takeshi
Format Journal Article
LanguageJapanese
Published The Japan Society of Mechanical Engineers 01.04.2019
Subjects
Active dynamic vibration absorber
Cryopump
Internal model principle
Low frequency
Output regulation
Pole assignment
Vibration control
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Summary:A vibration isolation device with an active dynamic vibration absorber is developed to remove vibration induced by a cryopump. Cryopump is used to make high-vacuum and low-temperature environments for precise measurement. However, it induces vibrations with multiple frequencies, which may deteriorate measurement accuracy. This study focuses on removing the vibration of low frequencies because conventional vibration isolation devices for cryopump can hardly remove them. In the developed vibration isolation device, an active vibration absorber is used to remove the vibration efficiently at low frequencies. The controller is designed based on the internal model principle. The pole assignment is used to tune the controller. The efficacy of the designed and tuned controller is demonstrated in the developed apparatus.
ISSN:2187-9761
DOI:10.1299/transjsme.18-00461