Fabrication of Al/AlO x /Al Josephson junctions and superconducting quantum circuits by shadow evaporation and a dynamic oxidation process

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Bibliographic Details
Published inChinese physics B Vol. 22; no. 6; p. 60309
Main Authors Wu, Yu-Lin, Deng, Hui, Yu, Hai-Feng, Xue, Guang-Ming, Tian, Ye, Li, Jie, Chen, Ying-Fei, Zhao, Shi-Ping, Zheng, Dong-Ning
Format Journal Article
LanguageEnglish
Published 01.06.2013
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ISSN:1674-1056
DOI:10.1088/1674-1056/22/6/060309