Constant voltage stress induced current in Ta 2 O 5 stacks and its dependence on a gate electrode
Saved in:
Published in | Semiconductor science and technology Vol. 23; no. 7; p. 75017 |
---|---|
Main Authors | , , , , , |
Format | Journal Article |
Language | English |
Published |
01.07.2008
|
Online Access | Get full text |
Cover
Loading…
ISSN: | 0268-1242 1361-6641 |
---|---|
DOI: | 10.1088/0268-1242/23/7/075017 |