Chemical composition of SF 6 low-pressure plasma in magnetic field

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Bibliographic Details
Published inJournal of physics. D, Applied physics Vol. 47; no. 4; p. 45205
Main Authors Levko, D, Garrigues, L, Hagelaar, G J M
Format Journal Article
LanguageEnglish
Published 29.01.2014
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ISSN:0022-3727
1361-6463
DOI:10.1088/0022-3727/47/4/045205