Correlation between the structural, morphological, optical, and electrical properties of In 2 O 3 thin films obtained by an ultrasonic spray CVD process
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Published in | Journal of semiconductors Vol. 36; no. 8; p. 82002 |
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Main Authors | , , , , , |
Format | Journal Article |
Language | English |
Published |
01.08.2015
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Online Access | Get full text |
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ISSN: | 1674-4926 |
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DOI: | 10.1088/1674-4926/36/8/082002 |