Etching mechanism of LiTaO 3 crystals in CHF 3 /Ar plasma

Saved in:
Bibliographic Details
Published inFerroelectrics Vol. 582; no. 1; pp. 28 - 35
Main Authors Zhong, Z. Q., Cao, M. C., Luo, W. B., Li, M. R., Dai, L. P., Wang, S. Y.
Format Journal Article
LanguageEnglish
Published 03.10.2021
Online AccessGet full text

Cover

More Information
ISSN:0015-0193
1563-5112
DOI:10.1080/00150193.2021.1951032