Ultrahigh density sub-10 nm TiO 2 nanosheet arrays with high aspect ratios via the spacer-defined double-patterning process

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Bibliographic Details
Published inPolymer (Guilford) Vol. 60; pp. 267 - 273
Main Authors Bak, Chang Hong, Ku, Se Jin, Jo, Gyeong Cheon, Jung, Kyoungok, Lee, Ha Jin, Kwon, Se Hun, Kim, Jin-Baek
Format Journal Article
LanguageEnglish
Published 01.03.2015
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ISSN:0032-3861
DOI:10.1016/j.polymer.2015.01.040