Modified textured surface MOCVD-ZnO：B transparent conductive layers for thinfilm solar cells

• Published in: 半导体学报：英文版 no. 4; pp. 37 - 41
• Main Author: 陈新亮 闫聪博 耿新华 张德坤 魏长春 赵颖 张晓丹
• Format: Journal Article
• Language: English
• Published: 2014
• Subjects: LP-MOCVD; 修改; 氧化锌; 纹理; 薄膜太阳能电池; 表面; 透明导电层; 金属有机化学气相沉积
• DOI: 10.1088/1674-4926/35/4/043002
• ISSN: 1674-4926

Modified textured surface boron-doped ZnO （ZnO：B） transparent conductive layers for thin-film solar cells were fabricated by low-pressure metal organic chemical vapor deposition （LP-MOCVD） on glass substrates. These modified textured surface ZnO：B thin films included two layers. The first ZnO：B layer, which has a pyramid- shaped texture, was deposited under conventional growth conditions, and the second layer, which has a sphere- like structure, at a relatively lower growth temperature. Typical bi-layer ZnO：B thin films exhibit a high electron mobility of 27.6 cm^2/（V.s） due to improved grain boundary states. For bi-layer ZnO：B, the haze value increases and the total transmittance decreases with the increasing film thickness of the second modification layer. When applied in hydrogenated microcrystalline silicon （μc-Si：H） thin-film solar cells, the modified textured surface ZnO：B layers present relatively higher conversion efficiency than conventional ZnO：B films.