Modified textured surface MOCVD-ZnO：B transparent conductive layers for thinfilm solar cells

Modified textured surface boron-doped ZnO （ZnO：B） transparent conductive layers for thin-film solar cells were fabricated by low-pressure metal organic chemical vapor deposition （LP-MOCVD） on glass substrates. These modified textured surface ZnO：B thin films included two layers. The first ZnO：B laye...

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Published in半导体学报：英文版 no. 4; pp. 37 - 41
Main Author 陈新亮 闫聪博 耿新华 张德坤 魏长春 赵颖 张晓丹
Format Journal Article
LanguageEnglish
Published 2014
Subjects
LP-MOCVD
修改
氧化锌
纹理
薄膜太阳能电池
表面
透明导电层
金属有机化学气相沉积
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Summary:Modified textured surface boron-doped ZnO （ZnO：B） transparent conductive layers for thin-film solar cells were fabricated by low-pressure metal organic chemical vapor deposition （LP-MOCVD） on glass substrates. These modified textured surface ZnO：B thin films included two layers. The first ZnO：B layer, which has a pyramid- shaped texture, was deposited under conventional growth conditions, and the second layer, which has a sphere- like structure, at a relatively lower growth temperature. Typical bi-layer ZnO：B thin films exhibit a high electron mobility of 27.6 cm^2/（V.s） due to improved grain boundary states. For bi-layer ZnO：B, the haze value increases and the total transmittance decreases with the increasing film thickness of the second modification layer. When applied in hydrogenated microcrystalline silicon （μc-Si：H） thin-film solar cells, the modified textured surface ZnO：B layers present relatively higher conversion efficiency than conventional ZnO：B films.
Bibliography:zinc oxide thin films; transparent conductive oxides; MOCVD; textured surface; thin-film solar cells
11-5781/TN
Chen Xinliang, Yan Congbo Geng Xinhua, Zhang Dekun, Wei Changchun, Zhao Ying, and Zhang Xiaodan（1 Institute of Photo-Electronic Thin Film Devices and Technology, Nankai University, Tianjin 300071, China 2Tianjin Key Laboratory of Photo-Electronic Thin Film Devices and Technology, Nankai University, Tianjin 300071, China 3 Key Laboratory of Opto-Electronic Information Science and Technology for Ministry of Education, Nankai University, Tianjin 300071, China）
Modified textured surface boron-doped ZnO （ZnO：B） transparent conductive layers for thin-film solar cells were fabricated by low-pressure metal organic chemical vapor deposition （LP-MOCVD） on glass substrates. These modified textured surface ZnO：B thin films included two layers. The first ZnO：B layer, which has a pyramid- shaped texture, was deposited under conventional growth conditions, and the second layer, which has a sphere- like structure, at a relatively lower growth temperature. Typical bi-layer ZnO：B thin films exhibit a high electron mobility of 27.6 cm^2/（V.s） due to improved grain boundary states. For bi-layer ZnO：B, the haze value increases and the total transmittance decreases with the increasing film thickness of the second modification layer. When applied in hydrogenated microcrystalline silicon （μc-Si：H） thin-film solar cells, the modified textured surface ZnO：B layers present relatively higher conversion efficiency than conventional ZnO：B films.
ISSN:1674-4926
DOI:10.1088/1674-4926/35/4/043002