The reaction of atomic oxygen with Si(100) and Si(111)

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Bibliographic Details
Published inSurface science Vol. 268; no. 1-3; pp. 238 - 264
Main Authors Engstrom, J.R., Bonser, D.J., Engel, Thomas
Format Journal Article
LanguageEnglish
Published 01.01.1992
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ISSN:0039-6028
DOI:10.1016/0039-6028(92)90966-A