Surface morphology and X-ray photoelectron spectroscopy of BiFeO 3 thin films deposited on top of Ta 2 O 5 /Si layers

In this study a comparison of the topography of BiFeO 3 (BFO) thin films deposited on tantalum pentoxide substrates of different thicknesses is provided. The Ta 2 O 5 substrates had a roughness increasing with the film thickness. The relationship between substrates of different topography but the sa...

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Published inE3S web of conferences Vol. 295; p. 4009
Main Authors Ramazanov, Shikhgasan, Ţălu, Ştefan, Dallaev, Rashid, Ramazanov, Guseyn, Škarvada, Pavel, Oulehla, Jindřich, Sobola, Dinara, Nazarov, Dmitry
Format Journal Article
LanguageEnglish
Published 2021
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Summary:In this study a comparison of the topography of BiFeO 3 (BFO) thin films deposited on tantalum pentoxide substrates of different thicknesses is provided. The Ta 2 O 5 substrates had a roughness increasing with the film thickness. The relationship between substrates of different topography but the same composition with the quality of the growing bismuth ferrite film is estimated. For the first time the topography estimation of BFO on Ta 2 O 5 is presented. The difference in temperature expansion coefficients leads to intensive evaporation of bismuth ferrite from the surface during annealing. XPS analysis is provided for asdeposited and annealed BFO layers.
ISSN:2267-1242
2267-1242
DOI:10.1051/e3sconf/202129504009