Effect of primary oxygen ion implantation on SIMS depth profiling in glasses
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Published in | Surface science |
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Main Author | |
Format | Journal Article |
Language | English |
Published |
03.02.2006
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Online Access | Get full text |
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ISSN: | 0039-6028 |
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DOI: | 10.1016/j.susc.2005.12.061 |