Low-energy ion bombardment induced anisotropy in sputtered MoS 2-x thin films

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Bibliographic Details
Published inJournal of physics. D, Applied physics Vol. 22; no. 8; pp. 1210 - 1216
Main Authors Sun, Z W, Gribi, P, Levy, F
Format Journal Article
LanguageEnglish
Published 14.08.1989
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ISSN:0022-3727
1361-6463
DOI:10.1088/0022-3727/22/8/029