Effect of the substrate bias voltage on the mechanical properties of nanocomposite CrZrSiN thin films

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Bibliographic Details
Published inKorean Journal of Metals and Materials Vol. 53; no. 8; pp. 549 - 554
Main Authors Lee, Sang-Yul, Kim, Kyu-Sung, Kim, Hoe-Kun, La, Joung-Hyun, Kim, Kwang-Bae
Format Journal Article
LanguageEnglish
Published 05.08.2015
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ISSN:1738-8228
2288-8241
DOI:10.3365/KJMM.2015.53.8.549