Close-spaced evaporation of CaGe 2 films for scalable GeH film formation

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Bibliographic Details
Published inMaterials science in semiconductor processing Vol. 132; p. 105928
Main Authors Hara, Kosuke O., Kunieda, Shin, Yamanaka, Junji, Arimoto, Keisuke, Itoh, Mai, Kurosawa, Masashi
Format Journal Article
LanguageEnglish
Published 01.09.2021
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ISSN:1369-8001
DOI:10.1016/j.mssp.2021.105928