Production of a large-volume negative-ion source using a multistring-type CF 4 magnetized plasma
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Published in | Plasma sources science & technology Vol. 16; no. 2; pp. 324 - 329 |
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Main Authors | , , |
Format | Journal Article |
Language | English |
Published |
01.05.2007
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Online Access | Get full text |
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ISSN: | 0963-0252 1361-6595 |
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DOI: | 10.1088/0963-0252/16/2/015 |