Fast Growth of Polycrystalline Film in SiCl 4 /H 2 Plasma
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Published in | Chinese physics letters Vol. 21; no. 6; pp. 1168 - 1170 |
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Main Authors | , , , , , , |
Format | Journal Article |
Language | English |
Published |
01.06.2004
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Online Access | Get full text |
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