Young s modulus measurements of silicon nanostructures using a scanning probe system: a non-destructive evaluation approach

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Published inSmart materials and structures Vol. 12; no. 6; pp. 1028 - 1032
Main Authors Virwani, Kumar R, Malshe, A P, Schmidt, W F, Sood, D K
Format Journal Article
LanguageEnglish
Published 01.12.2003
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Author Virwani, Kumar R
Sood, D K
Malshe, A P
Schmidt, W F
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Cites_doi 10.1063/1.119522
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10.1109/84.896765
10.1109/SENSOR.1997.613725
10.1109/84.661392
10.1063/1.361102
10.1557/mrs2002.16
10.1016/0921-5107(89)90284-5
10.1557/mrs2000.68
10.1063/1.346957
10.1109/84.709653
10.1109/84.623107
10.1016/S0921-4526(99)01835-9
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References 12
Virwani K R Malshe A P Schmidt W F Sood D K (13) 2002
(16); Software Version 5.12r3
Baker S P (15) 2002; 27
Sharpe W N (4) 1997; 6
Li X Ono T Wang Y Esashi M (11) 2002
1
(17); Version 4.43B
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Gumbsch P (14) 2000; 25
Young W C (18) 2002
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  doi: 10.1063/1.119522
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    fullname: Virwani K R Malshe A P Schmidt W F Sood D K
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  doi: 10.1063/1.117548
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  doi: 10.1109/84.896765
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  doi: 10.1109/SENSOR.1997.613725
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  start-page: 106
  year: 1998
  ident: 5
  publication-title: IEEE J. MEMS
  doi: 10.1109/84.661392
  contributor:
    fullname: Tsuchiya T
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  doi: 10.1063/1.361102
– volume: 27
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  issn: 0883-7694
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  ident: 15
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  doi: 10.1557/mrs2002.16
  contributor:
    fullname: Baker S P
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  ident: 18
  publication-title: Roark’s Formulas for Stress and Strain
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  ident: 11
  publication-title: 15th IEEE Int. Conf. on MEMS (Jan. 2002)
  contributor:
    fullname: Li X Ono T Wang Y Esashi M
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  doi: 10.1016/S0921-4526(99)01835-9
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Title Young s modulus measurements of silicon nanostructures using a scanning probe system: a non-destructive evaluation approach
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