Young s modulus measurements of silicon nanostructures using a scanning probe system: a non-destructive evaluation approach

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Bibliographic Details
Published inSmart materials and structures Vol. 12; no. 6; pp. 1028 - 1032
Main Authors Virwani, Kumar R, Malshe, A P, Schmidt, W F, Sood, D K
Format Journal Article
LanguageEnglish
Published 01.12.2003
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ISSN:0964-1726
1361-665X
DOI:10.1088/0964-1726/12/6/023