In situ study on the thermal stability and interfaces properties of Er 2 O 3 /Al 2 O 3 /Si multi stacked films by X-ray photoelectron spectroscopy

Saved in:
Bibliographic Details
Published inSuperlattices and microstructures Vol. 104; pp. 415 - 421
Main Authors Gao, Baolong, Mamat, Mamatrishat, Ghupur, Yasenjan, Ablat, Abduleziz, Ibrahim, Kurash, Wang, Jiaou, Liu, Chen, Zhao, Jiali
Format Journal Article
LanguageEnglish
Published 01.04.2017
Online AccessGet full text

Cover

More Information
ISSN:0749-6036
DOI:10.1016/j.spmi.2017.02.050