Microwave TFTs Made of MOCVD ZnO With ALD Al 2 O 3 Gate Dielectric

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Bibliographic Details
Published inIEEE journal of the Electron Devices Society Vol. 4; no. 2; pp. 55 - 59
Main Authors Mi, Hongyi, Seo, Jung-Hun, Ku, Chieh-Jen, Shi, Jian, Wang, Xudong, Lu, Yicheng, Ma, Zhenqiang
Format Journal Article
LanguageEnglish
Published 01.03.2016
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ISSN:2168-6734
2168-6734
DOI:10.1109/JEDS.2016.2516499