High-resolution transmission electron microscopic investigations of molybdenum thin films on faceted α-Al 2 O 3
Epitaxially grown Mo films on a faceted corundum (α-Al 2 O 3 ) m plane were investigated by transmission electron microscopy. Low- and high-resolution images were taken from a cross-section specimen cut perpendicular to the facets. It was possible to identify unambiguously the crystallographic orien...
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| Published in | Journal of applied crystallography Vol. 38; no. 2; pp. 260 - 265 |
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| Main Authors | , , |
| Format | Journal Article |
| Language | English |
| Published |
01.04.2005
|
| Online Access | Get full text |
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| Summary: | Epitaxially grown Mo films on a faceted corundum (α-Al
2
O
3
)
m
plane were investigated by transmission electron microscopy. Low- and high-resolution images were taken from a cross-section specimen cut perpendicular to the facets. It was possible to identify unambiguously the crystallographic orientation of these facets and explain the considerable deviation (∼10°) of the experimental interfacet angle, as measured with atomic force microscopy (AFM), from the expected value. For the first time, proof is given for a smooth \{10\bar{1}1\} facet and a curvy facet with orientation near to \{10\bar{1}\bar{2}\}. Moreover, the three-dimensional epitaxial relationship of an Mo film on a faceted corundum
m
surface was determined. |
|---|---|
| ISSN: | 0021-8898 |
| DOI: | 10.1107/S0021889804033126 |