Accelerated ferroelectric phase transformation in HfO 2 /ZrO 2 nanolaminates

Abstract Ferroelectric phase transformation was compared between the Hf 0.5 Zr 0.5 O 2 solid solution films and the HfO 2 /ZrO 2 nanolaminate films, prepared by sputter deposition without heat treatment and crystallized by following cap annealing. Physical analyses showed that nanolaminate structure...

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Bibliographic Details
Published inApplied physics express Vol. 14; no. 5; p. 51006
Main Authors Migita, Shinji, Ota, Hiroyuki, Asanuma, Shutaro, Morita, Yukinori, Toriumi, Akira
Format Journal Article
LanguageEnglish
Published 01.05.2021
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Summary:Abstract Ferroelectric phase transformation was compared between the Hf 0.5 Zr 0.5 O 2 solid solution films and the HfO 2 /ZrO 2 nanolaminate films, prepared by sputter deposition without heat treatment and crystallized by following cap annealing. Physical analyses showed that nanolaminate structures and their interfaces were robust even after high-temperature annealing. Ferroelectricity appeared largely in the nanolaminate films than in the solid solution film, and the best performance was attained in the nanolaminate film with the cycle thickness of monolayer oxide (0.25 nm). Long period annealing cleared that the ferroelectric phase transformation is greatly accelerated in the nanolaminate films than in the solid solution films.
ISSN:1882-0778
1882-0786
DOI:10.35848/1882-0786/abfa75