Direct deposition of SrBi 2 Ta 2 O 9 Film on IrO 2 electrode using liquid source CVD method

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Bibliographic Details
Published inIntegrated ferroelectrics Vol. 26; no. 1-4; pp. 103 - 108
Main Authors Eshita, Takashi, Yamawaki, Hideki, Miyagaki, Shinji, Arimoto, Yoshihiro
Format Journal Article
LanguageEnglish
Published 01.10.1999
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ISSN:1058-4587
1607-8489
DOI:10.1080/10584589908215615