Structural and electrical properties of Nb-doped TiO 2 films sputtered with plasma emission control

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Bibliographic Details
Published inThin solid films Vol. 568; pp. 94 - 101
Main Authors Mukherjee, S.K., Becker, H.W., Cadiz Bedini, A.P., Nebatti, A., Notthoff, C., Rogalla, D., Schipporeit, S., Soleimani-Esfahani, A., Mergel, D.
Format Journal Article
LanguageEnglish
Published 01.10.2014
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ISSN:0040-6090
DOI:10.1016/j.tsf.2014.08.011