Atomic Layer Deposition of Ultrathin Tungsten Oxide Films from WH 2 (Cp) 2 and Ozone

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Bibliographic Details
Published inJournal of physical chemistry. C Vol. 125; no. 39; pp. 21663 - 21669
Main Authors Kozodaev, Maxim G., Romanov, Roman I., Chernikova, Anna G., Markeev, Andrey M.
Format Journal Article
LanguageEnglish
Published 07.10.2021
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ISSN:1932-7447
1932-7455
DOI:10.1021/acs.jpcc.1c06149