newcommand{\bt}{\beta} \bt$ -TaON thin films: production by reactive magnetron sputtering and the question of non-stoichiometry

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Bibliographic Details
Published inJournal of physics. D, Applied physics Vol. 52; no. 30; p. 305304
Main Authors Salamon, K, Mičetić, M, Sancho-Parramon, J, Bogdanović Radović, I, Siketić, Z, Šarić, I, Petravić, M, Bernstorff, S
Format Journal Article
LanguageEnglish
Published 24.07.2019
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ISSN:0022-3727
1361-6463
DOI:10.1088/1361-6463/ab1d09