Errata to "Self-supporting uncooled infrared microbolometers with low-thermal mass"
Saved in:
Published in | Journal of microelectromechanical systems Vol. 10; no. 4; p. 616 |
---|---|
Main Authors | , , |
Format | Journal Article |
Language | English |
Published |
New York
IEEE
01.12.2001
The Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
Subjects | |
Online Access | Get full text |
Cover
Loading…
ISSN: | 1057-7157 1941-0158 |
---|---|
DOI: | 10.1109/JMEMS.2001.967385 |