Influence of O( 3 P)/O 2 Flux on the Atomic Layer Deposition of B 2 O 3 Using Trimethyl Borate at Room Temperature

Saved in:

Bibliographic Details
Published in	Journal of physical chemistry. C Vol. 124; no. 47; pp. 25846 - 25858
Main Authors	Pilli, Aparna, Lee, Veronica, Jones, Jessica, Chugh, Natasha, Du, Jincheng, Pasquale, Frank, LaVoie, Adrien, Kelber, Jeffry
Format	Journal Article
Language	English
Published	25.11.2020
Online Access	Get full text

Loading…

More Information
ISSN:	1932-7447 1932-7455
DOI:	10.1021/acs.jpcc.0c07586