Piezoelectric characterization of Sc 0.26 Al 0.74 N layers on Si (001) substrates

Saved in:
Bibliographic Details
Published inMaterials research express Vol. 5; no. 3; p. 36407
Main Authors Sinusía Lozano, M, Pérez-Campos, A, Reusch, M, Kirste, L, Fuchs, Th, Žukauskaitė, A, Chen, Z, Iriarte, G F
Format Journal Article
LanguageEnglish
Published 14.03.2018
Online AccessGet full text

Cover

More Information
ISSN:2053-1591
2053-1591
DOI:10.1088/2053-1591/aab232