STUDY OF ION IMPLANTATION INTO GAN SUBTRATE AND THIN FILM BY METAL ORGANIC CHEMICAL VAPOR DEPOSITION TECHNIQUE (MOCVD)
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Published in | International Journal of Technical Research & Science Vol. 5; no. 3; pp. 16 - 29 |
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Main Authors | , , , , |
Format | Journal Article |
Language | English |
Published |
12.03.2020
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Online Access | Get full text |
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ISSN: | 2454-2024 2454-2024 |
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DOI: | 10.30780/IJTRS.V05.I03.003 |