Mechanisms of Dopant Depth Profile Modification During Mass Spectrometric Analysis of Multilayer Structure

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Bibliographic Details
Published in	Ukrainian journal of physics (Kiev) Vol. 60; no. 6; pp. 511 - 520
Main Authors	Efremov, A.A., Litovchenko, V.G., Melnik, V.P., Oberemok, O.S., Popov, V.G., Romanyuk, B.M.
Format	Journal Article
Language	English
Published	01.06.2015
Online Access	Get full text

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ISSN:	2071-0186 2071-0194
DOI:	10.15407/ujpe60.06.0511