Evolution of Lattice Strain in Hydrogen-Implanted Silicon Prior to Layer Splitting: an X-Ray Scattering Study

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Bibliographic Details
Published inMeeting abstracts (Electrochemical Society) Vol. MA2006-02; no. 30; p. 1359
Main Authors Capello, Luciana, Rieutord, Francois, Tauzin, Aurelie, Mazen, Frederic, Sousbie, Nicolas, Letertre, Fabrice
Format Journal Article
LanguageEnglish
Published 30.06.2006
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ISSN:2151-2043
2151-2035
DOI:10.1149/MA2006-02/30/1359