Reevaluation of Hydrogen Gas Dissolved Cleaning Solutions in Single Wafer Megasonic Cleaning

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Bibliographic Details
Published inMeeting abstracts (Electrochemical Society) Vol. MA2009-02; no. 24; p. 2087
Main Authors Kang, Bong-Kyun, Lee, Seung-Ho, Kim, In-Jung, Choi, Eun-Suck, Kim, Bong-Woo, Busnaina, Ahmed A., Hattori, Takeshi, Park, Jin-Goo
Format Journal Article
LanguageEnglish
Published 10.07.2009
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ISSN:2151-2043
2151-2035
DOI:10.1149/MA2009-02/24/2087