Low Temperature Bonding of PECVD Silicon Dioxide Layers

Saved in:
Bibliographic Details
Published inMeeting abstracts (Electrochemical Society) Vol. MA2006-02; no. 30; p. 1364
Main Authors Baine, Paul T., Bain, Michael, McNeill, D. W., Gamble, Harold S, Armstrong, Mervyn
Format Journal Article
LanguageEnglish
Published 30.06.2006
Online AccessGet full text

Cover

More Information
ISSN:2151-2043
2151-2035
DOI:10.1149/MA2006-02/30/1364