Defects Origin on Epitaxial Silicon Layer on a Double-Porous Silicon Layer
Saved in:
Published in | Meeting abstracts (Electrochemical Society) Vol. MA2011-01; no. 29; p. 1641 |
---|---|
Main Authors | , , , , |
Format | Journal Article |
Language | English |
Published |
01.03.2011
|
Online Access | Get full text |
Cover
Loading…
ISSN: | 2151-2043 2151-2035 |
---|---|
DOI: | 10.1149/MA2011-01/29/1641 |