Composition and Strain Evolution of Undoped Si 0.8 Ge 0.2 Layers Submitted to UV-Nanosecond Laser Annealing

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Bibliographic Details
Published inECS transactions Vol. 86; no. 7; pp. 29 - 39
Main Authors Dagault, Lea, Acosta-Alba, Pablo, Kerdilès, Sébastien, Barnes, Jean-Paul, Hartmann, Jean-Michel, Gergaud, Patrice, Nguyen, Than Tra, Grenier, Adeline, Aubin, Joris, Cristiano, Fuccio
Format Journal Article
LanguageEnglish
Published 20.07.2018
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ISSN:1938-6737
1938-5862
DOI:10.1149/08607.0029ecst