Conversion Electron/He Ion Yield XAFS of SrTiO 3 Thin Films

It is known that the dielectric constant of SrTiO 3 thin film deposited on a thick substrate decreases with decreasing the thickness. This may be related with local atomic distortion in SrTiO 3 thin film. In order to detect the atomic distortion, Sr and Ti K-edge XAFS spectra were measured with a to...

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Bibliographic Details
Published inJapanese Journal of Applied Physics Vol. 38; no. S1; p. 198
Main Authors Yanase, Etsuya, Watanabe, Iwao, Harada, Makoto, Takahashi, Masao, Dake, Yoshinori, Hiroshima, Yasushi
Format Journal Article
LanguageEnglish
Published 01.01.1999
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Summary:It is known that the dielectric constant of SrTiO 3 thin film deposited on a thick substrate decreases with decreasing the thickness. This may be related with local atomic distortion in SrTiO 3 thin film. In order to detect the atomic distortion, Sr and Ti K-edge XAFS spectra were measured with a total-conversion electron/He ion-yield (CEY/CIY) apparatus which is easy to build and to operate. We confirmed the validity of our fabricated CEY/CIY apparatus and applied it to XAFS measurement of SrTiO 3 thin films. Fourier transforms of XAFS at different thicknesses suggested the local distortion induced by the internal stress in thin films.
ISSN:0021-4922
1347-4065
DOI:10.7567/JJAPS.38S1.198