Employ Present Five Masks Amorphous Silicon Thin-Film Transistor Design and Process Flow to Realize 5-in. InGaZnO Active-Matrix Liquid Crystal Display with Improved Stress Stability

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Bibliographic Details
Published inJapanese Journal of Applied Physics Vol. 50; no. 3S; p. 3
Main Authors Hung, Ming-Chin, Hsiao, Hsia-Tsai, Lin, Wei-Ting, Tu, Chun-Hao, Chang, Jiun-Jye, Chen, Po-Lun
Format Journal Article
LanguageEnglish
Published 01.03.2011
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ISSN:0021-4922
1347-4065
DOI:10.7567/JJAP.50.03CB07