Thermoelastic Damping in Micromechanical Resonators with a Proof Mass and a Network of Suspension Beams

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Published inJapanese Journal of Applied Physics Vol. 50; no. 7R; p. 77202
Main Authors Li, Pu, Hu, Rufu
Format Journal Article
LanguageEnglish
Published 01.07.2011
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Author Li, Pu
Hu, Rufu
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10.1109/84.809070
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10.1103/PhysRev.52.230
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10.1109/JMEMS.2006.879374
10.1109/JMEMS.2008.2004794
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Title Thermoelastic Damping in Micromechanical Resonators with a Proof Mass and a Network of Suspension Beams
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