Thermoelastic Damping in Micromechanical Resonators with a Proof Mass and a Network of Suspension Beams

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Bibliographic Details
Published inJapanese Journal of Applied Physics Vol. 50; no. 7R; p. 77202
Main Authors Li, Pu, Hu, Rufu
Format Journal Article
LanguageEnglish
Published 01.07.2011
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ISSN:0021-4922
1347-4065
DOI:10.7567/JJAP.50.077202