Study on Adhesive Strength between Ge 2 Sb 2 Te 5 Film and Electrodes for Phase Change Memory Application
Saved in:
Published in | Japanese Journal of Applied Physics Vol. 48; no. 10; p. 101601 |
---|---|
Main Authors | , , , , , , , , , , , , |
Format | Journal Article |
Language | English |
Published |
01.10.2009
|
Online Access | Get full text |
Cover
Loading…
ISSN: | 0021-4922 1347-4065 |
---|---|
DOI: | 10.1143/JJAP.48.101601 |