Area-Selective Atomic Layer Deposition of SnS 2 Nanosheets for Applications of Back-End-of-Line-Compatible Transistors

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Bibliographic Details
Published inACS applied nano materials Vol. 6; no. 3; pp. 1678 - 1685
Main Authors Yim, Jaegyun, Chung, Hong Keun, Ryu, Seung Ho, Kim, Han, Won, Sung Ok, Eom, Taeyong, Chung, Taek-Mo, Kim, Seong Keun
Format Journal Article
LanguageEnglish
Published 10.02.2023
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ISSN:2574-0970
2574-0970
DOI:10.1021/acsanm.2c04620