On the Characteristics of ZnO Films Grown on (11-20) Sapphire Substrates by Atomic Layer Deposition using DEZn and N2O
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Published in | Meeting abstracts (Electrochemical Society) Vol. MA2009-01; no. 19; p. 811 |
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Main Authors | , , , , , , , , |
Format | Journal Article |
Language | English |
Published |
01.05.2009
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Online Access | Get full text |
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ISSN: | 2151-2043 2151-2035 |
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DOI: | 10.1149/MA2009-01/19/811 |