Atomic Scale Thickness Control of SOI Wafers for Fully Depleted Applications

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Bibliographic Details
Published inMeeting abstracts (Electrochemical Society) Vol. MA2013-01; no. 21; p. 880
Main Authors Schwarzenbach, Walter, Daval, Nicolas, Barec, Vincent, Bonnin, Olivier, Acosta-Alba, Pablo-Eduardo, Maddalon, Catherine, Chibko, Alexandre, Robson, Timothy, Nguyen, Bich-Yen, Maleville, Christophe
Format Journal Article
LanguageEnglish
Published 08.03.2013
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ISSN:2151-2043
2151-2035
DOI:10.1149/MA2013-01/21/880