Characteristics of In 0.7 Ga 0.3 As MOS Capacitors Obtained using Hydrochloric Acid Treatment, Ammonium Sulfide Passivation, Methanol Treatment, and Forming Gas Annealing

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Bibliographic Details
Published inECS journal of solid state science and technology Vol. 8; no. 9; pp. P457 - P463
Main Authors Chung, Sheng-Ti, Huang, Yi-Chin, Fu, Yen-Chun, Lee, Yao-Jen, Chao, Tien-Sheng
Format Journal Article
LanguageEnglish
Published 2019
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ISSN:2162-8769
2162-8777
DOI:10.1149/2.0091909jss