Effect of Laser Energy Density on the Fabrication of Ba 2 NaNb 5 O 15 Thin Films by Pulsed Laser Ablation

Ferroelectric thin films of barium sodium niobate, Ba 2 NaNb 5 O 15 (BNN), were prepared on Pt substrates by pulsed laser ablation at O 2 gas pressures of 0.01 and 0.1 Torr. We examined the effect of laser energy density on the fabrication of BNN thin films. The laser energy density was changed from...

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Bibliographic Details
Published inJapanese Journal of Applied Physics Vol. 36; no. 9S; p. 5925
Main Authors Ando, Shizutoshi, Konakahara, Kaoru, Okamura, Soichiro, Takeyo Tsukamoto, Takeyo Tsukamoto
Format Journal Article
LanguageEnglish
Published 01.09.1997
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Summary:Ferroelectric thin films of barium sodium niobate, Ba 2 NaNb 5 O 15 (BNN), were prepared on Pt substrates by pulsed laser ablation at O 2 gas pressures of 0.01 and 0.1 Torr. We examined the effect of laser energy density on the fabrication of BNN thin films. The laser energy density was changed from 1.67 J/cm 2 to 5.0 J/cm 2 . On increasing laser energy density, the chemical composition of thin films approached the BNN stoichiometry. Crystallinity of BNN thin films fabricated at higher laser energy densities developed a tendency to orient along the c -axis. Thin films of BNN deposited at an O 2 gas pressure of 0.1 Torr and a laser energy density of 5.0 J/cm 2 have a stoichiometoric composition and a prominent c -axis orientation with a remanent plarization P r of 0.8 µ C/cm 2 and a coercive field E c of 24.0 kV/cm at room temperature.
ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.36.5925